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Process Specialties was the first company back in 1996 to offer 300mm processing services to Machine Tool and IC processing companies world wide. For the past 21 years we have been delivering quick turn times and reliable high quality confidential 300mm processing services to our clients. In 2017 we continue to be a valuable resource for our clients R & D and service processing needs.

In 1997 Process Specialties developed the first production 300mm LPCVD Nitride and Poly Silicon systems. Since then we have processed hundreds of thousands of wafers through our Nitride and Poly Silicon systems. In total since 1996 Process Specialties has successfully processed well over one million 300mm wafers through various operations. Today we offer a myriad of 300mm processing services, including our newest offering of 2um CD Stepped Lithography in 5 um - 10 um thick I-line resist.

When it comes to 300mm processing remember, that PSI is the most experienced and trusted company currently offering 300mm wafer processing services on the planet!

300mm Processes                                                             Specifications  

DRY THERMAL OXIDE  800-900C

THERMAL OXIDE (H2 O2 Wet Steam) Max 900C

POLYSILICON DEPOSITION  610C

LPCVD NITRIDE DEPOSITION  820C

PVD PURE ALUMINUM

PVD ALUMINUM / Cu .5%

PVD TITANIUM (Ti)

PVD TITANIUM NITRIDE (TiN)

PVD TANTALUM (Ta)

PVD TANTALUM NITRIDE (TaN)

PVD COPPER (Cu)

PVD CHROME (Cr)

PVD TUNGSTEN (W)

WET CLEANING

WET PATTERNED ETCHING

WAFER RECYCLING

PLASMA STRIPPING / ETCHING

PHOTORESIST STRIPPING

PROXIMITY PHOTOLITHOGRAPHY  (Full Wafer)

STEPPED PHOTOLITHOGRAPHY THIN RESIST 1.2um - 1.5um

STEPPED PHOTOLITHOGRAPHY THICK RESIST 3um - 10um

BLANKET I-LINE PHOTORESIST COATING

BLANKET 193 nm DUV PHOTORESIST COATING

BLANKET 248nm DUV PHOTORESIST COATING

40 - 900

900 - 25,000

1000 - 20,000

200 - 3,000

1,000 - 20,000

1,000 - 20,000

200 - 3,000

200 - 3,000

200 - 3,000

200 - 3,000

200 - 20,000

200 - 2,000

200 - 2000

RCA, SC1 - SC2, Dilute HF Cleaning / Dipping...

HF-BOE Oxide etch, Metal Etch, etc.

WET STRIP FILMS, OXIDE, NITRIDE, POLY...

POLY / NITRIDE  (5um+ Feature Etching)

H2SO4 / H202 (PIRANHA), O2 PLASMA

4 CD MICRON PSI / CUSTOMER SUPPLIED MASKS

.8 CD MICRON PSI / CUSTOMER SUPPLIED MASKS

2 CD MICRON PSI / CUSTOMER SUPPLIED MASKS

1.4 um - 10.0 um Thickness

.25 um - .4 um Thickness

1.0um - 3.0um Thickness

If you are interested in any of the above processing services contact Customer Service at 800.533.8820 for a quotation. If you do not see exactly the 300mm process you are looking for please contact us, as we cannot list all of our services here and we may offer what you need. If we do not offer your custom processing, we may be able to give you a referral to another qualified supplier.

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